TCO Sputter (PVD)

Station #5 · cell side · ×4 parallel · 180s cycle

running

Availability

97.4%

Performance

95.5%

Quality

98.6%

WIP

874 processed · 27 rejected

TCO Sputter — optical / electrical

Transmission spectrum (400–1100 nm)

⟨T⟩ = 89.8% · Jsc_mul 0.987

Sheet R vs O₂/(Ar+O₂) %

R□ front 66.1 Ω/sq · back 35.7 Ω/sq

Target life & poisoning

Target life remaining47.00%

Poisoning offset0.18

Contact ρ 4.07 mΩ·cm² · n_e 4.0e20

TCO is a four-way optical/electrical/contact/optical-stack trade-off. O₂ sweet-spot ~2%. Poisoning offset > 0.3 → schedule target replacement.

Adjustments mutate the active recipe and propagate through the physics chain on the next tick. Changes are logged in the lever tracker.

Sputter power6.00 kW

range 2–10

O₂/(Ar+O₂)2.00 %

range 0.5–5

Pressure5.00 mTorr

range 1–10

Scan speed12.00 mm/s

range 5–25

Substrate T150 °C

range 20–200

Lever-tracker filtered to this station:

t	Param	Old → New
413.5	o2Ratio	2 → 1.95
376.1	sputterKw	6 → 5.8