Wafer Inspection
Station #1 · cell side · ×4 parallel · 1.5s cycle
running
Availability
95.3%
Performance
95.1%
Quality
96.8%
WIP
0
954 processed · 19 rejected
Recipe levers
This station is statistical — no operator levers.
Recent events
Lever-tracker filtered to this station:
| t | Param | Old → New |
|---|